Polymer webs are important substrates for various types of flexible applications such as food packaging, decorative products and flexible electronics. In order to obtain functionalities on these polymer webs such as antimicrobial properties or incorporate them as part of a flexible permeation barrier system, a smooth and defect free surface of the polymer film is needed. Unfortunately pristine polymer substrates often show different kinds of defects, like particles or crystalline areas. By using a wet coating on these substrates, a smooth surface can be generated. To ensure very high productivity and prevention of thermal stress, electron beam (EB) technology can be used. The presented work will show how the varnish composition and the EB process parameters influence the surface morphology. The results of white light interferometry and atomic force microscopy will be shown hereby.