New Result About Multi-Functional Plasma Polymer Thin Films Fabricated by Large Area Roll-to-Roll Sputtering Process

New Result About Multi-Functional Plasma Polymer Thin Films Fabricated by Large Area Roll-to-Roll Sputtering Process

Dr Sang-Jin Lee
Korea Research Institute of Chemical Technology

Multi-functional fluorocarbon plasma polymer thin films are fabricated on a large-area polyethylene terephthalate substrate using continuous roll-to-roll sputtering with a 700-mm film width. Polymer/Conducting material composite target is used for the mid-range frequency sputtering for the first time. They exhibit water-repelling surfaces to preventing wetting and to remove contamination. In this presentation, newly developed plasma polymer thin film having various surface and bulk properties such as hydrophobicity, anti-fingerprint, high hardness with excellent flexibility, anti-reflection and anti-bacterial using pilot scale roll-to-roll sputtering will be introduced. And the development of a water-repellent, large-area, transparent film heater for automibile and architecture will be also presented.