10 Ways to Improve Corona & Atmospheric Plasma Treatment Results

Feedback Control Loop for R&D Vacuum Coating Tool

Sascha Kreher, Stella Van Eek, Torsten Winkler
FHR Anlagenbau GmbH

In order to coat flexible substrates and obtain competitive results, the coating process should be well monitored and the films should undergo an adequate in-situ metrology. In this work we show the implementation of a system for In-Situ X-Ray-Fluorescence in a R2R vacuum coater. The System has a feedback control loop for readjusting the process parameters and enhancing the results. The resulting tool for R&D and preproduction of films is shown and the results for a "CIGS Photovoltaic Application" case study are analyzed.