Transparent barrier coated films have been with display devices for many years and recently started to adapt in rollable OLED displays. So, they need more higher barrier properties along to several materials using vacuum deposited transparent barrier films, including the different technology items, early processing issues and some of the original moisture prevent barrier films. Among the barrier layers, It could be made effective barrier process was improved and developed into the organic & inorganic multi-layer in order to realize high transmittance and flexibilities . I’d like to introduce our research and development by using roll-to-roll large area several polymer substrates, including the vacuum processes along the development experiences, the performance advantages we see, the considerations of coating film thickness, interface controls between organic / inorganic layers and tension control ranges. Further, plasma treatments were employed to adjust the functionality of the organic surfaces and their effects on microstructure evolution of subsequent depositing layers are discussed. In order to evaluate the mechanical properties and film adhesion of the inorganic-organic hybrid coatings, in-situ AFM coupled nanoindentation techniques were introduced. Especially, plastic barrier film can bring high level of flexibility, which could not be achieved by any conventional lighting method.In this paper, barrier film with various WVTR value, including 10-6 -order, was applied and the conditions to have very little or almost no dark spot growth under 85°C85% high temperature / humidity test are shown.