Enhanced properties of HPPMS sputtered barrier layers on web

Enhanced properties of HPPMS sputtered barrier layers on web

Ken Nauman
VON ARDENNE

A comparison study of possible improvements to barrier properties of compound layers used to prevent contaminant diffusion on polymers by using HPPMS reactive sputtering. Standard Pulsed DC or MF sputtering will be compared with HPPMS to observe any benefits attained by using HPPMS.This is being conducted as a collaboration with Fraunhofer FEP, VON ARDENNE, GP Plasma, and Nano4Energy.