Taking R2R Sputtering to Next Level

Taking R2R Sputtering to Next Level

Senthil Vinodh
Applied Materials Web Coating GmbH

With leading-edge applications demanding low cost and high throughput production, sputter roll coating technology is strongly recommended as a viable solution. The evolution that started as early as 1934 has drastically improved in the recent times to deploy state-of-the-art R2R Sputtering technology together with Linear Ion Source pre-treatment, Bipolar Pulsed Twin rotatable sputter deposition cathodes, low defect winding architecture, scanning full-width optical metrology and in-line defect metrology. In this report, we discuss the key breakthroughs in coater- and process technology to meet the requirements of emerging markets.