Flexibility and Mechanical Property of Transparent Thin Films Fabricated by R2R sputtering and CVD

Flexibility and Mechanical Property of Transparent Thin Films Fabricated by R2R sputtering and CVD

Sang-Jin Lee
Korea Research Institute of Chemical Technology

Flexibility properties via bending, twisting, rolling test were investigated for transparent thin film fabricated by pilot scale R2R sputtering. ITO thin films show good flexibillity as a result of inner and outer bending test. And bending property was examined for transparent barrier thin film such as SiOx and SiNx as function of film thickness. The performance of the transparent thin films by R2R sputtering process presented has high potential for future flexible electronics applications.