FHR Anlagenbau GmbH

FHR Anlagenbau GmbH


FHR Anlagenbau GmbH

Am Hügel 2
Ottendorf-Okrilla, Saxony 01458 | View on Google Maps
+49 35205 5200

Email: postbox@fhr.de
Business Description: FHR Anlagenbau GmbH was founded in 1991 and offers vacuum coating systems and sputtering targets as well as coating and plant service from a single source. The close cooperation with our customers starts with the process development and continues with the development of pilot plants up to serial production or mass production. Our portfolio integrates technologies as sputtering, vapor deposition, PECVD and ALD into the machine types cluster, inline, roll-to-roll and box. Based in Germany and with systems installed worldwide for various applications as semiconductors, MEMS, electronics, sensors, optics, photovoltaics, etc., we will jointly find your vacuum coating solution.

The Thin Film Company

Products / Services / Brands:
FHR.Star product series – Flexible cluster-type coating equipment for depos¬ition onto wafers and wafer-type substrates
FHR.Boxx product series – Batch-type coating equipment – with optional load lock – for upscaled single-chamber production
FHR.Line product series – Vertical or horizontal inline coating equipment for high-throughput production or large substrate sizes
FHR.Roll product series – PVD/PECVD coating equipment for flexible substrates with widths from 300 to 2400 mm
FHR.Star-EOSS® product series – Enhanced Optical Sputter System for deposition of high-precision thin-film optical filters

Vacuum Coating Processes
Design and Manufacturing of Vacuum Coating Equipment
Sample Coatings & Coating Services
Deposition Materials, Sputtering Targets

Key Sales Contact:
Email: sales@fhr.de
Member Since: 2015

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